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Planar Zn diffusion in InP

✍ Scribed by E.A. Rezek; P.D. Wright; N. Holonyak Jr.


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
582 KB
Volume
21
Category
Article
ISSN
0038-1101

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## Abstract In this work, the selective Zn diffusion process is applied in the conventional p‐i‐n PD/HBT structure to improve the PD's performance. Without Zn diffusion, the top‐illuminated PD need higher reverse bias to delay the screen effect. With Zn diffusion, the βˆ’3 dB bandwidth can be extende