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Investigation of Zn diffusion in InP using dimethylzinc as Zn source

✍ Scribed by M. Wada; K. Sakakibara; M. Higuchi; Y. Sekiguchi

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
526 KB
Volume
114
Category
Article
ISSN
0022-0248

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πŸ“œ SIMILAR VOLUMES

Using selective Zn diffusion to enhance
Using selective Zn diffusion to enhance the performance of the photodiode in InP/InGaAs PD/HBT integration
✍ Shou-Chien Huang; Wei-Kuo Huang; Yue-Ming Hsin; Jin-Wei Shi πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 134 KB

## Abstract In this work, the selective Zn diffusion process is applied in the conventional p‐i‐n PD/HBT structure to improve the PD's performance. Without Zn diffusion, the top‐illuminated PD need higher reverse bias to delay the screen effect. With Zn diffusion, the βˆ’3 dB bandwidth can be extende