✦ LIBER ✦

Pileup of arsenic implanted into silicon with high doses at surfaces

✍ Scribed by Katsuhiro Yokota; Koichi Ohtsuki; Shinji Ishihara; Itsuro Kimura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ H.I. Budinov; D.S. Karpuzov 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 495 KB

Direct evidence of arsenic clustering in

✍ Wu, N. R.; Sadana, D. K.; Washburn, J. 📂 Article 📅 1984 🏛 American Institute of Physics 🌐 English ⚖ 519 KB

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Rapid thermal annealing of high dose ars

✍ R. Kögler; E. Wieser; G. Otto; P. Knothe 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 644 KB

Effects of high dose fluorine implantati

✍ S.P. Wong; I.H. Wilson; W.Y. Cheung; W.K. Mok; S.K. Hark 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 334 KB

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✍ R. Marinescu; A. Silard 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 158 KB