✦ LIBER ✦

High dose arsenic implantation of silicon

✍ Scribed by H.I. Budinov; D.S. Karpuzov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Direct evidence of arsenic clustering in

✍ Wu, N. R.; Sadana, D. K.; Washburn, J. 📂 Article 📅 1984 🏛 American Institute of Physics 🌐 English ⚖ 519 KB

Rapid thermal annealing of high dose ars

✍ R. Kögler; E. Wieser; G. Otto; P. Knothe 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 644 KB

Pulsed electron-beam annealing of high-d

✍ A. Turos; J. Geerk 📂 Article 📅 1980 🏛 Springer 🌐 English ⚖ 253 KB

Pileup of arsenic implanted into silicon

✍ Katsuhiro Yokota; Koichi Ohtsuki; Shinji Ishihara; Itsuro Kimura 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 611 KB

Residual disorder in silicon after annea

✍ D. Hagmann 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 370 KB

The migration of the defects induced by

✍ R. Marinescu; S. Prisecaru; R. Albu 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 298 KB