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Piezoelectric actuators in micropositioning

โœ Scribed by Pozzi, M.; King, T.


Book ID
114442305
Publisher
IEEE
Year
2001
Tongue
English
Weight
750 KB
Volume
10
Category
Article
ISSN
0963-7346

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Microactuators with multiple degrees of freedom, which can provide many benefits in precision engineering, are in demand for industrial applications. We propose two new actuators (Y-type and '-type) which can move in the x, y, and T directions. They are combinations of piezoelectric and electromagne