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PHYSICS OF SEMICONDUCTOR DEVICES

✍ Scribed by RUDAN, MASSIMO


Publisher
SPRINGER INTERNATIONAL PU
Year
2017
Tongue
English
Leaves
936
Category
Library

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✦ Synopsis


This textbook describes the basic physics of semiconductors, including the hierarchy of transport models, and connects the theory with the functioning of actual semiconductor devices. Details are worked out carefully and derived from the basic physical concepts, while keeping the internal coherence of the analysis and explaining the different levels of approximation. Coverage includes the main steps used in the fabrication process of integrated circuits: diffusion, thermal oxidation, epitaxy, and ion implantation. Examples are based on silicon due to its industrial importance. Several chapters are included that provide the reader with the quantum-mechanical concepts necessary for understanding the transport properties of crystals. The behavior of crystals incorporating a position-dependent impurity distribution is described, and the different hierarchical transport models for semiconductor devices are derived (from the Boltzmann transport equation to the hydrodynamic and drift-diffusion models). The transport models are then applied to a detailed description of the main semiconductor-device architectures (bipolar, MOS, CMOS), including a number of solid-state sensors. The final chapters are devoted to the measuring methods for semiconductor-device parameters, and to a brief illustration of the scaling rules and numerical methods applied to the design of semiconductor devices.

✦ Table of Contents


Front Matter ....Pages i-xlvii
Front Matter ....Pages 1-1
Analytical Mechanics (Massimo Rudan)....Pages 3-24
Coordinate Transformations and Invariance Properties (Massimo Rudan)....Pages 25-43
Applications of the Concepts of Analytical Mechanics (Massimo Rudan)....Pages 45-74
Electromagnetism (Massimo Rudan)....Pages 75-93
Applications of the Concepts of Electromagnetism (Massimo Rudan)....Pages 95-117
Front Matter ....Pages 119-119
Classical Distribution Function and Transport Equation (Massimo Rudan)....Pages 121-141
From Classical Mechanics to Quantum Mechanics (Massimo Rudan)....Pages 143-170
Time-Independent SchrΓΆdinger Equation (Massimo Rudan)....Pages 171-192
Time-Dependent SchrΓΆdinger Equation (Massimo Rudan)....Pages 193-205
General Methods of Quantum Mechanics (Massimo Rudan)....Pages 207-218
Front Matter ....Pages 219-219
Elementary Cases (Massimo Rudan)....Pages 221-236
Cases Related to the Linear Harmonic Oscillator (Massimo Rudan)....Pages 237-246
Other Examples of the SchrΓΆdinger Equation (Massimo Rudan)....Pages 247-276
Time-Dependent Perturbation Theory (Massimo Rudan)....Pages 277-297
Front Matter ....Pages 299-299
Many-Particle Systems (Massimo Rudan)....Pages 301-326
Separation of Many-Particle Systems (Massimo Rudan)....Pages 327-337
Front Matter ....Pages 339-339
Periodic Structures (Massimo Rudan)....Pages 341-413
Electrons and Holes in Semiconductors at Equilibrium (Massimo Rudan)....Pages 415-449
Front Matter ....Pages 451-451
Mathematical Model of Semiconductor Devices (Massimo Rudan)....Pages 453-505
Generation-Recombination and Mobility (Massimo Rudan)....Pages 507-542
Front Matter ....Pages 543-543
Bipolar Devices (Massimo Rudan)....Pages 545-599
MOS Devices (Massimo Rudan)....Pages 601-669
Front Matter ....Pages 671-671
Thermal Diffusionβ€”Ion Implantation (Massimo Rudan)....Pages 673-701
Thermal Oxidationβ€”Layer Deposition (Massimo Rudan)....Pages 703-721
Measuring the Semiconductor Parameters (Massimo Rudan)....Pages 723-743
Back Matter ....Pages 745-917


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