Physicochemical characterization by means of IR absorption spectroscopy of Si3N4 thin films obtained by chemical vapour deposition assisted by in situ electrical disharge

✍ Scribed by B. Balland; J.C. Bureau; R. Botton; A. Glachant; M. Lemiti

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 305 KB
• Volume: 20
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(93)90417-l