✦ LIBER ✦
FT-IR, SIMS and electrical characterization of Si3N4 thin films obtained from CVD, assisted by in situ electrical discharge
✍ Scribed by B. Balland; R. Botton; M. Lemiti; J.C. Bureau; A. Glachant
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 342 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2692
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