✦ LIBER ✦

Physical vapor deposition (PVD) processes

✍ Scribed by Mattox, Donald M.

Book ID: 122412014
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 897 KB
Volume: 97
Category: Article
ISSN: 0026-0576
DOI: 10.1016/S0026-0576(00)83101-3

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