Handbook of Physical Vapor Deposition (P
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Mattox, Donald M.
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Article
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1998
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Elsevier
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English
โ 94 KB
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that