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Physical properties of tin oxide thin films improved by vapour chopping

โœ Scribed by R.B. Patil; R.K. Puri; Vijaya Puri


Book ID
116602946
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
442 KB
Volume
463
Category
Article
ISSN
0925-8388

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Physical properties of TiN thin films
โœ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties