Physical limits of “superresolution lithography”
✍ Scribed by R. Hild; G. Nitzsche; U. Altenburger
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 298 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
We show that physical devices that perform observation, prediction, or recollection share an underlying mathematical structure. We call devices with that structure "inference devices". We present a set of existence and impossibility results concerning inference devices. These results hold independen
## Abstract Soft lithographic microcontact printing using the residual polydimethylsiloxane (PDMS) found in elastomeric PDMS stamps is demonstrated to lead to unstable prints with sub‐micrometer dimensions. The statics and dynamics of the process have been followed with time‐resolved atomic force m