✦ LIBER ✦
Superresolution lithography from the viewpoint of partially coherent imaging theory Part II: Isolated structures
✍ Scribed by R. Hild; G. Nitzsche; U. Altenburger
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 764 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.