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Physical characterization of thin ALD–Al2O3 films

✍ Scribed by Stefan Jakschik; Uwe Schroeder; Thomas Hecht; Dietmar Krueger; Guenther Dollinger; Andreas Bergmaier; Claudia Luhmann; Johann W Bartha


Book ID
108418052
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
222 KB
Volume
211
Category
Article
ISSN
0169-4332

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