✦ LIBER ✦

Crystallization behavior of thin ALD-Al2O3 films

✍ Scribed by Stefan Jakschik; Uwe Schroeder; Thomas Hecht; Martin Gutsche; Harald Seidl; Johann W. Bartha

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Physical characterization of thin ALD–Al

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Mechanical stress in ALD-Al2O3 films

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Thin film Al2O3 capacitors

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Improved thin film Al2O3 capacitors

✍ M.K. Rao; S.R. Jawalekar 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 189 KB

Noise in thin film Al-Al2O3-Al diodes

✍ S.T. Liu; A. Van Der Ziel 📂 Article 📅 1967 🏛 Elsevier Science ⚖ 211 KB