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Photoresist characterization and linearization procedure for the gray-scale fabrication of diffractive optical elements

✍ Scribed by LeCompte, Marion ;Gao, Xiang ;Prather, Dennis W.


Book ID
115349621
Publisher
The Optical Society
Year
2001
Tongue
English
Weight
418 KB
Volume
40
Category
Article
ISSN
1559-128X

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