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Photonic bandgap materials and birefringent layers based on anisotropically nanostructured silicon

✍ Scribed by Kashkarov, Pavel K.; Golovan, Leonid A.; Fedotov, Andrei B.; Efimova, Alexandra I.; Kuznetsova, Lubov P.; Timoshenko, Victor Yu.; Sidorov-Biryukov, Dmitrii A.; Zheltikov, Aleksei M.; Haus, Joseph W.


Book ID
115396774
Publisher
Optical Society of America
Year
2002
Tongue
English
Weight
702 KB
Volume
19
Category
Article
ISSN
0740-3224

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## Abstract Anisotropic nanostructuring of bulk silicon (Si) wafers leads to a significant in‐plane optical anisotropy of single porous silicon (PSi) layers. Additionally a variation of the etching current in time allows a controlled modification of the porosity along the growth direction and there