Silicon based optical devices - photonic
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Diener, J. ;KΓΌnzner, N. ;Gross, E. ;Kovalev, D. ;Fujii, M.
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Article
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2005
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John Wiley and Sons
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English
β 327 KB
## Abstract Anisotropic nanostructuring of bulk silicon (Si) wafers leads to a significant inβplane optical anisotropy of single porous silicon (PSi) layers. Additionally a variation of the etching current in time allows a controlled modification of the porosity along the growth direction and there