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Photoluminescence of silicon after deposition of polycrystalline diamond films

✍ Scribed by D. F. Aminev; V. S. Bagaev; T. I. Galkina; A. Yu. Klokov; V. S. Krivobok; V. G. Ralchenko; A. V. Savel’ev

Book ID
111444427
Publisher
Springer
Year
2009
Tongue
English
Weight
258 KB
Volume
43
Category
Article
ISSN
1063-7826

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✍ Victor S. Bagaev; Denis F. Aminev; Tatiana I. Galkina; Andrey Yu. Klokov; Vladim 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 194 KB

The low temperature (5 K) photoluminescence (PL) of silicon substrate in the range of 0.8-1.12 eV before and after microwave plasma assisted chemical vapor deposition of polycrystalline diamond films was studied. The diamond films were deposited onto the pure (r$3 kOhm cm) dislocation-free silicon t