✦ LIBER ✦

Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

✍ Scribed by Takao Kawai; Masahiro Okawa; Atsushi Komatsu; Tetsuya Shimada; Mitsugu Hanabusa

Book ID: 103617758
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 235 KB
Volume: 79-80
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90441-3

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Wavelength dependence in photochemical v

Wavelength dependence in photochemical vapor deposition of aluminum film using dimethylaluminum hydride

✍ Mitsuga Hanabusa; Masashi Ikeda 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 316 KB 👁 1 views

The deposition of aluminum thin films by

The deposition of aluminum thin films by CVD using a novel adduct of dimethylaluminum hydride

✍ Dr. Anthony C. Jones; Dr. David J. Houlton; Simon A. Rushwarth; Julia A. Flanaga 📂 Article 📅 1995 🏛 John Wiley and Sons 🌐 English ⚖ 467 KB 👁 1 views