**A maskless method for patterning substrates** using surface relief structures on azobenzeneโfunctionalized polymer is demonstrated. Surface relief structures are inscribed on a polymer film spinโcoated on an indium tin oxide (ITO) substrate by exposure to an interference pattern. Etching with oxyg
โฆ LIBER โฆ
Photoinduced fabrication of complex surface relief structures on azobenzene functionalized polymers
โ Scribed by J Kumar; L Li; Nirmal K Viswanathan; S Bian; S Balasubramanian; D Y Kim; S K Tripathy
- Book ID
- 110659866
- Publisher
- Springer-Verlag
- Year
- 1999
- Tongue
- English
- Weight
- 692 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0250-4707
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