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Photofabrication of Kinoforms as Multilevel Relief Structures on Azobenzene-Containing Polymer Films

โœ Scribed by Minabe, Jiro; Yasuda, Shin; Kawano, Katsunori; Maruyama, Tatsuya; Yamada, Hidenori


Book ID
124052146
Publisher
Institute of Pure and Applied Physics
Year
2003
Tongue
English
Weight
189 KB
Volume
42
Category
Article
ISSN
0021-4922

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Patterning of Substrates Using Surface R
โœ S. Yang; K. Yang; L. Niu; R. Nagarajan; S. Bian; A.โ€‰K. Jain; J. Kumar ๐Ÿ“‚ Article ๐Ÿ“… 2004 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 191 KB ๐Ÿ‘ 2 views

**A maskless method for patterning substrates** using surface relief structures on azobenzeneโ€functionalized polymer is demonstrated. Surface relief structures are inscribed on a polymer film spinโ€coated on an indium tin oxide (ITO) substrate by exposure to an interference pattern. Etching with oxyg