Photoetching of n-GaAs in Na+ and K+ salts

✍ Scribed by V. Švorčík; V. Rybka; V. Myslík

• Book ID: 103028449
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 230 KB
• Volume: 157
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(89)87268-9

✦ Synopsis

HeNe laser radiation was studied in aqueous solutions of alkali hydroxides and salts with the following anions: F-, Cl-, Br-, I-, CO:-and SO:-. The etching rate depends on the size of the ions in solution. The isomorphic properties of some NH:, Rb+ and K+ salts were also investigated with respect to photoetching.