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Photoenhanced CVD of hydrogenated amorphous silicon using an internal hydrogen discharge lamp

✍ Scribed by W.I. Milne; F.J. Clough; S.C. Deane; S.D. Baker; P.A. Robertson

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 508 KB
Volume: 43
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90225-0

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