✦ LIBER ✦
Hydrogenated amorphous silicon films prepared at low substrate temperature on a cathode of an asymmetric r.f. plasma CVD system
✍ Scribed by Tanay Seth; P.N. Dixit; C. Mukherjee; C. Anandan; R. Bhattacharyya
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 743 KB
- Volume
- 264
- Category
- Article
- ISSN
- 0040-6090
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