Photoelectrochemical methods for semicon
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Paul A. Kohl; Derek B. Harris
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Article
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1993
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Elsevier Science
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English
โ 538 KB
usefulness and capabilities of photoelectrochemical processing of III-V semiconductors is presented. Examples include the etching of small period gratings, the formation of integral lenses, the decomposition of small bandgap semiconductors, the etching of ptype semiconductors, and the photoinitiated