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Photoelectric, stoichiometric and structural properties of n-ZnO film on p-Si

✍ Scribed by H.Y. Kim; J.H. Kim; M.O. Park; S. Im


Book ID
117226586
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
319 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin