✦ LIBER ✦

Photochemical Etching of Silicon

✍ Scribed by M.L. Ngan; K.C. Lee; K.W. Cheah

Book ID: 110278699
Publisher: Springer
Year: 2000
Tongue: English
Weight: 404 KB
Volume: 7
Category: Article
ISSN: 1380-2224
DOI: 10.1023/a:1009686420494

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Laser photochemical etching of silicon

✍ S. Affrossman; R. T. Bailey; C. H. Cramer; F. R. Cruickshank; J. M. R. MacAllist 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 973 KB

Photochemical etching of silicon by two

Photochemical etching of silicon by two photon absorption

✍ Ouyang, H. ;Deng, Y. ;Knox, W. H. ;Fauchet, P. M. 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 449 KB

## Abstract Photochemical etching of silicon assisted by two‐photon absorption (TPA) in the presence of hydrofluoric acid (HF) is demonstrated using a below‐bandgap femtosecond laser source. We investigate the morphology of the etched silicon as a function of the laser power, exposure time, as well

One-dimensional photonic crystal fabrica

One-dimensional photonic crystal fabricated by the photochemical etching of silicon

✍ E. V. Astrova; V. A. Tolmachev; G. V. Fedulova; V. A. Melnikov; T. S. Perova 📂 Article 📅 2010 🏛 Allerton Press Inc 🌐 English ⚖ 217 KB

Photoluminescence and AFM characterisati

Photoluminescence and AFM characterisation of photochemically etched highly resistive n-type silicon

✍ T. Hadjersi; E.S. Kooij; N. Yamamoto; K. Sakamaki; H. Takai; N. Gabouze 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 376 KB

Dry Photochemical Etching of Metallic Fi

Dry Photochemical Etching of Metallic Films

✍ Anatolii V. Vannikov; Antonina D. Grishina; Marine G. Tedoradze 📂 Article 📅 1992 🏛 Royal Society of Chemistry 🌐 English ⚖ 734 KB

Pattern formation techniques in photoche

Pattern formation techniques in photochemical etching

✍ Carol I.H Ashby 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 735 KB