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Photoacoustic measurement of thermal properties of TiN thin films

โœ Scribed by A. Albert Irudayaraj; R. Srinivasan; P. Kuppusami; E. Mohandas; S. Kalainathan; K. Ramachandran


Publisher
Springer
Year
2007
Tongue
English
Weight
349 KB
Volume
43
Category
Article
ISSN
0022-2461

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๐Ÿ“œ SIMILAR VOLUMES


Physical properties of TiN thin films
โœ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties