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Photoablation of thin indium oxide films under the action of a pulsed arf excimer laser

✍ Scribed by N. A. Kaliteevskaya; R. P. Seisyan


Book ID
110129846
Publisher
SP MAIK Nauka/Interperiodica
Year
2002
Tongue
English
Weight
31 KB
Volume
28
Category
Article
ISSN
1063-7850

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Growth dynamics of pulsed laser deposite
✍ Neeti Tripathi; Shyama Rath; V. Ganesan; R.J. Choudhary πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 313 KB

a b s t r a c t Indium oxide films are deposited by pulsed laser deposition in the presence of oxygen atmosphere, on different substrates, namely GaAs, Si, quartz, and glass. The structural, morphological, and interface characteristics are studied. Cubic In 2 O 3 phase is confirmed by high resolutio