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Phosphorus redistribution in the surface region of heavily phosphorus doped silicon

โœ Scribed by Y. Mizokawa; W.B. Ying; Y.B. Yu; Y. Kamiura; M. Iida; K. Kawamoto


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
411 KB
Volume
100-101
Category
Article
ISSN
0169-4332

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