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On the mechanism responsible for phosphorus inactivation in heavily doped silicon

✍ Scribed by G.F. Cerofolini; M.L. Polignano; F. Nava; G. Ottaviani


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
231 KB
Volume
97
Category
Article
ISSN
0040-6090

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