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Phase stability of hafnium oxide and zirconium oxide on silicon substrate

✍ Scribed by Dongwon Shin; Zi-Kui Liu

Book ID: 113896730
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 177 KB
Volume: 57
Category: Article
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2007.04.011

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