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Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

✍ Scribed by De Keyser, K.; Van Bockstael, C.; Van Meirhaeghe, R. L.; Detavernier, C.; Verleysen, E.; Bender, H.; Vandervorst, W.; Jordan-Sweet, J.; Lavoie, C.

Book ID: 120089528
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 712 KB
Volume: 96
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3384997

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