𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Phase and structural evolution of sol–gel synthesized ZrO2/Si thin films under heat treatment

✍ Scribed by Soo Min Hwang; Geun Chul Park; Jun Hyung Lim; Jinho Joo

Book ID
113069915
Publisher
Springer
Year
2012
Tongue
English
Weight
706 KB
Volume
47
Category
Article
ISSN
0022-2461

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural and electrical characteristic
Structural and electrical characteristics of ZrO2–TiO2 thin films by sol–gel method
✍ Cheng-Hsing Hsu; Ching-Fang Tseng; Chun-Hung Lai; Hsin-Han Tung; Shih-Yao Lin 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 558 KB

In this paper, we investigated electrical properties and microstructures of ZrTiO 4 (ZrO 2 -TiO 2 ) thin films prepared by the sol-gel method on ITO substrates at different annealing temperatures. All films exhibited ZrTiO 4 (1 1 1) and (1 0 1) orientations perpendicular to the substrate surface, an