✦ LIBER ✦

Phase and energy distribution of ions incident on electrodes in radio-frequency discharges

✍ Scribed by Hebner, Gregory A.; Kushner, Mark J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of electrode material on measured

✍ Olthoff, J. K.; Van Brunt, R. J.; Radovanov, S. B. 📂 Article 📅 1995 🏛 American Institute of Physics 🌐 English ⚖ 249 KB

Distribution of ion energies incident on

✍ Kushner, M. J. 📂 Article 📅 1985 🏛 American Institute of Physics 🌐 English ⚖ 963 KB

Structured ion energy distribution in ra

✍ Wild, Ch.; Koidl, P. 📂 Article 📅 1989 🏛 American Institute of Physics 🌐 English ⚖ 548 KB

Lecture notes on radio-frequency dischar

✍ Goedheer, W J 📂 Article 📅 2000 🏛 Institute of Physics 🌐 English ⚖ 206 KB

Ion energy and angular distributions in

✍ Woodworth, Joseph R.; Riley, Merle E.; Meister, Dorothy C.; Aragon, Ben P.; Le, 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 354 KB

Ion energy and angular distributions in

✍ Woodworth, J. R.; Riley, M. E.; Miller, P. A.; Hebner, G. A.; Hamilton, T. W. 📂 Article 📅 1997 🏛 American Institute of Physics 🌐 English ⚖ 525 KB