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Phase analysis of PZT 52/48 thin films by synchrotron XRD

✍ Scribed by Y. Liu; C. Xu; H. Liu; H. Toraya; T. Watanabe


Book ID
110296429
Publisher
Springer
Year
2001
Tongue
English
Weight
52 KB
Volume
20
Category
Article
ISSN
0261-8028

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In this study, the radio frequency (RF) magnetron sputtering process is used to generate a PZT ferroelectric thin film on a silicon substrate. The surface characteristics of this lead zirconate titanate film Pb(Zr Ti )O is then investigated by means of an atomic force microscopy (AFM) method. The r