𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating

✍ Scribed by Guipeng Luo; Haiming Wu; Mu Wang; Shining Zhu; Yanqing Lu; Zhiguo Liu; Yu Wei; Naiben Ming


Publisher
Springer
Year
1997
Tongue
English
Weight
438 KB
Volume
42
Category
Article
ISSN
1001-6538

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Cost-effective fabrication of a phase ma
✍ Ying-Tsung Lu; Yung-Hsin Chen; Sien Chi πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 176 KB

## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on