Periodic patterning using multi-facet prism based laser interference lithography

✍ Scribed by R. Sidharthan; F. Chollet; V. M. Murukeshan

• Book ID: 110208188
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 411 KB
• Volume: 19
• Category: Article
• ISSN: 1054-660X
• DOI: 10.1134/s1054660x09030256