Nano-scale patterning using pyramidal prism based wavefront interference lithography

✍ Scribed by R. Sidharthan; VM Murukeshan

• Book ID: 113846629
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 436 KB
• Volume: 19
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2011.06.185