Performance data of an environmentally stable deep UV positive resist

✍ Scribed by T. Fischer; U. Boettiger; A. Grassmann; H. Moritz; H. Binder; D. Funhoff; R. Schwalm

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 371 KB
• Volume: 23
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(94)90163-5