✦ LIBER ✦
Photoacid catalyzed main chain scission of poly(butene-1 sulfone) as a deep UV positive resist
✍ Scribed by Wen-an Loong; Hsien-wu Chang
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 542 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0167-9317
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