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Performance-based reliability assessment of electromagnetic pumps

โœ Scribed by I. V. Vitkovskii; I. R. Kirillov; P. Yu. Chaika; E. A. Kryuchkov; V. M. Poplavskii; Yu. V. Nosov; N. N. Oshkanov

Book ID
106355261
Publisher
Springer US
Year
2007
Tongue
English
Weight
97 KB
Volume
102
Category
Article
ISSN
1573-8205

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The performance assessment of sputter io
The performance assessment of sputter ion pumps
โœ D Andrew ๐Ÿ“‚ Article ๐Ÿ“… 1966 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 762 KB

The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both o