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Peening in ion-assisted thin-film deposition: a generalized model

✍ Scribed by Carter, G

Book ID: 126763539
Publisher: Institute of Physics
Year: 1994
Tongue: English
Weight: 837 KB
Volume: 27
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/27/5/024

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