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A rate-equation model for the growth of metallic thin films in ion beam assisted deposition

✍ Scribed by J. Sillanpää; I.T. Koponen; N. Grønbech-Jensen

Book ID: 114165109
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 173 KB
Volume: 184
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00821-7

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