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PECVD films for low-temperature poly-Si TFT-LCD applications

✍ Scribed by T. Takehara; W. R. Harshbarger; C. C. Tsai; D. Toet; T. Sigmon

Book ID: 119924079
Publisher: Society for Information Display
Year: 2001
Tongue: English
Weight: 372 KB
Volume: 9
Category: Article
ISSN: 1071-0922
DOI: 10.1889/1.1844663

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