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Patterning silicon carbide on silicon by ion modification of C60 films

✍ Scribed by L. Moro; A. Paul; D.C. Lorents; R. Malhotra; R.S. Ruoff; L. Jiang

Book ID: 114168494
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 252 KB
Volume: 121
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00587-3

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