Patterning of porous silicon nanostructures and eliminating microcracks on silicon nitride mask using metal assisted chemical etching

✍ Scribed by Mohammad Zahedinejad; Mahdi khaje; Alireza Erfanian; Farshid Raissi; Hamed Mehrara; Farshad Rezvani

• Book ID: 113937153
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 970 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.07.007