✦ LIBER ✦
Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures
✍ Scribed by Hildreth, Owen James; Lin, Wei; Wong, Ching Ping
- Book ID
- 120218172
- Publisher
- American Chemical Society
- Year
- 2009
- Tongue
- English
- Weight
- 537 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1936-0851
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