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Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography

โœ Scribed by Ki-Yeon Yang; Sung-Hoon Hong; Deok-kee Kim; Byung-ki Cheong; Heon Lee


Book ID
108207655
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
541 KB
Volume
84
Category
Article
ISSN
0167-9317

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