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Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

✍ Scribed by St. Trellenkamp; J. Moers; A. van der Hart; P. Kordoš; H. Lüth

Book ID: 114155617
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 350 KB
Volume: 67-68
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00187-4

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